Electrically conducting probes with full tungsten cantilever and tip[EPFL]

mt7344

Electrically conducting probes with full tungsten cantilever and tip for scanning probe applications
; M6 U$ ~1 ?$ j9 |& p! f9 k) K$ aAbstract
We have developed a new hybrid AFM probe combining an SU-8 polymer
9 x  p3 G, F" H, g! \body with a full tungsten cantilever having a nanometric tip. The fabrication
. |/ R6 j9 e0 i. _- @is based on surface micromachining a silicon wafer, where tungsten is sputter
deposited in oxidation sharpened moulds to yield sharp tips with radius
0 i5 f2 C2 u  D& c- L' [below 20 nm. The material properties of tungsten were measured, yielding a
7 y3 A. S8 g" o" m- Whardness of 14 GPa, a specific resistivity of 14.8 μ
cm and Young’s
modulus of 380 GPa. Analyses of the probes show a mechanical quality
factor of 90 in air, and a low contact resistance of 25
on a gold sample is
measured. AFM imaging is demonstrated. As a step in the development of a
$ a$ I/ v% X2 h+ p, Q* Vrobust electrically conducting AFM probe, the results are very promising.



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( @+ E  x) |/ Y, i9 z9 ?& P0 A[ 本帖最後由 mt7344 於 2007-6-7 10:12 PM 編輯 ]