An Orthogonal Fluxgate-Type Magnetic Microsensor[EPFL]

mt7344

ABSTRACT
# p9 I+ ^$ ~% @  v1 NIn this paper, we present a new microfabricated
orthogonal fluxgate sensor structure. The sensor
) x' Y3 M. M4 R4 o3 Hconsists of an electroplated copper excitation rod
surrounded by an electroplated permalloy layer and has
! I+ \/ T8 Q5 C. {6 B3 Y' Wplanar pick-up coils for signal detection. The use of
electroplating leads to a low-cost fabrication process
2 c9 `( G; g4 X! @9 b7 N' T  l2 oand the use of planar pick-up coils provides easy
integration with CMOS processes. The fabricated
sensor has an excitation independent linear range of
+ [; M& u! S& o- y- V8 @±100 μT, a sensitivity of 280 μV/mT, and an average
" k% e" P3 W5 V; [  w) T2 Fpower dissipation of 0.8 mW for 30 mA-peak
sinusoidal excitation current at 100 kHz frequency.
# n" }9 ?" `1 d0 h
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