An integrated micro-Hall probe for scanning magnetic microscopy[EPFL]

mt7344

Abstract
  v# I4 l1 A; w- O( e" v4 w9 U2 DAnewmicrosystem with the ability to detect magnetic microstructures based on the non-invasive Hall principle is presented. The micro-Hall plate embedded in the microsystem and scaled down to the physical limits of the employedCMOStechnology has an active area of only 2.4
m×2.4
m. The microsystem exhibits an output sensitivity of 7.5 V/T in perpendicular direction to the chip surface and a magnetic field resolution of 300 nT/√Hz at 1 Hz. A two-dimensional magnetic scanner was developed to demonstrate the performances of the developed microsystem.
# N5 o1 \7 W% |$ i) s
( H$ z- e- l9 R6 a3 i& U. G0 Y
7 K" W* C/ I( I- d2 X* V! K0 \/ q網路上抓的 paper, 希望對大家有幫助!!
# Y% Y' U) Q+ j權限10 & RDB=3
  c- \3 P* S/ r0 z) L' X$ [
8 n. p; L1 A7 t/ Z$ P1 ^( q2 E

1 u8 t& r4 }- k