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發表於 2010-6-25 08:50:33
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Abstract -- The diode operated in forward-biased condition has( W, J- f0 }* W
been widely used as an effective on-chip ESD protection device at& h5 }% D7 `" o7 C
GHz RF and high-speed I/O pads due to the small parasitic
; L3 S: |2 N1 z/ e+ C9 p! dloading effect and high ESD robustness in CMOS integrated+ I" I4 o- b+ B6 I
circuits (ICs). This work presents new ESD protection diodes* k W3 `( b& W- I; A* T, e
realized in the octagon, waffle-hollow, and octagon-hollow layout
% p& T, p+ j5 L$ s$ ~$ F- Nstyles to improve the efficiency of ESD current distribution and
- q3 g8 m ]* Q4 J/ `to reduce the parasitic capacitance. The new ESD protection
5 s4 \* h. D" S! p2 @- Cdiodes can achieve smaller parasitic capacitance under the same
: ]4 m/ R3 r' i5 ~* g5 oESD robustness level as compared to the waffle diode. Therefore,
; A) t% o; }/ ~: x* ithe signal degradation of GHz RF and high-speed transmission
; X2 c0 o& { \+ _0 u* P7 U7 Kcan be reduced due to smaller parasitic capacitance from the new
, }4 o: W, @- ?* l% D8 hproposed diodes. |
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