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用drc report上的坐標來找error
8 `3 K& f' y9 s0 I0 B, s/ l2 ~' q卻發現error是在corner LL之中
4 ~5 I2 O9 {5 {& S S如附件圖 970926-1.jpg及970926-2.jpg
" i m9 t, @* E% E7 `, K B(兩張圖上的2個小白點即是問題所在)( h$ y* `) C! W! s0 a. p
這是在corner LL之中請問這該如何處理呢?/ C# H8 N6 f8 |; @% X, k9 W
將calibre drc嵌入astro中,點error坐標也是顯示在 corner LL
/ |% D/ D1 v0 E已確認過了corner LL沒有任何的線及cell放置。+ Z: \ H3 z/ `. j0 x( j( O
請各位大大幫幫忙,小弟先在這邊謝謝各位前輩了3 \/ P$ Z, X0 f ^. h: e
坐標及error message 如下:7 n; t, }* S' e& G H7 x
M5.W.1: z v, j$ a$ S, @
8 8 3 May 12 17:34:49 2009 1 P# s# ?% \9 ]4 {6 }6 y. b8 L
M5.W.1 { @ M5 width < 0.28* d( j- g; c6 G1 q i- F: h
INT M5 < 0.28 SINGULAR REGION ABUT < 90. L7 R/ p; R' Z: g& o
}. c) p! S& o; A+ d3 `8 O
p 1 3
# Y! w6 f8 n* R S1 l) v+ W205180 235000
" o Q$ Q8 G6 q& E205460 234720
4 \4 ]' U: Y* a4 r9 [" Z1 J- p O205576 235000
" h& |! l7 U; p' z. E" N5 i8 gp 2 33 U4 e6 B6 o( A6 ?
207720 235000
1 L8 t4 R0 }; x: Z& s& a/ `208000 234720+ F8 b% t0 D. _. Z+ f9 C
208116 235000
4 H( C E5 l- c x: sp 3 36 p8 k2 H+ q* {6 H% T0 X M
217525 235000
8 O9 z; T- z/ t5 g* ~" ^( g217805 234720
% }# r7 P. X2 h; P! W; r" t217921 235000# X% I, R: R2 I) `+ S* C" m
p 4 3
$ z* H$ n! Q3 m9 ^" g226625 2350003 ^5 C/ ]8 E/ l% y
226905 234720
" S( X5 q4 i& Y( @% ^227021 2350002 a& d! U1 Z0 L: E. F1 w7 ~4 s: N, o
p 5 33 N; {% X0 a% n
234720 205460
4 L5 d1 h( r [235000 205180
6 N2 N1 H8 R2 X5 [+ R235000 205576
: E3 v; e! r. z2 ]p 6 3- Z2 {7 \( W' c' {9 \8 d) f
234720 2080009 F$ ^( W% m" y( J% g$ m( d1 K
235000 207720
; d- y( T) r7 N+ @, s% b/ j235000 208116' @: X' H9 F9 E x. a" _% p$ H
p 7 33 T2 x( k5 }& v% e/ J
234720 217805
( `/ d* f* I; T/ z0 {6 b5 P235000 217525
1 D- i$ E! J% O$ g235000 217921
) J* S: k3 `# b7 D7 [3 h' ~p 8 3: c( X" h; p) \% Q
234720 226905
# f. \) b: C* y% w; f235000 226625( I# B6 v5 ^5 G% e, E% r+ \6 Y* {& t$ h
235000 227021+ n3 _1 n" I1 q" x
M4.W.1
* k% T7 f' B1 |4 n; D+ T- @+ |8 8 3 May 12 17:34:41 2009
1 T# P8 P; C- y. C Y2 p8 W& K* bM4.W.1 { @ M4 width < 0.28
" v2 N& a [, C% ?2 [& m! W1 t INT M4 < 0.28 SINGULAR REGION ABUT < 90! }# n- [- f' b0 m
}
; \2 P1 |) m5 g* u8 S# vp 1 3# G" P6 l( z# n2 |) D0 S
205180 235000) _& s! p- j% k8 a/ ~
205460 234720
9 C/ m& b6 `. X% s205576 235000
8 ^& K( J* p6 q" yp 2 3+ |) t: ]) r/ b0 A; j8 u l7 F
207720 235000/ W" p9 P8 P9 z% Z0 K5 S3 I- a
208000 234720
% f3 L5 f& K6 G6 F208116 235000% R: s/ W: q0 ?* v- [' E5 k
p 3 3
& a. p1 L- T4 A# x( b: z217525 235000& E- U8 w' R, E+ M* p
217805 234720
. H- C, Z9 x! g217921 2350007 O' e) _$ R4 K
p 4 32 H4 _" M2 r/ D v9 h* s
226625 235000
, K x q/ k2 W2 m3 m2 s8 ? ?3 H226905 234720! P0 o6 Z# {. f# \8 `
227021 2350003 @: V- K9 M) V0 a
p 5 3! W& I( G1 H' G) V
234720 205460" y' ?8 r w2 K9 W9 \2 ] h
235000 2051800 n* z$ v9 I" M
235000 2055760 g) b& ?) R, B8 Z& ^' A7 ^
p 6 3
8 W* V) ~; X; ]* S+ P234720 208000
: s6 y7 K* w/ ?! r0 F235000 207720
4 B& l1 U- G" L235000 208116
- S; }8 f5 Z5 P1 ]: Fp 7 3
, K* x7 u/ J0 S/ _/ [/ p. D234720 2178050 F% i7 ?- u# H( ]8 ^5 C5 ]% u
235000 217525. W7 f% ]/ n- y( [+ D( z
235000 217921. W! |) ~: }/ y2 g
p 8 3
% _8 Y2 E& x; T# R, @ p2 d y; r9 [234720 226905+ ]" o9 b% X9 `
235000 226625
0 L- m9 x' C/ R# t4 W) r235000 2270217 g' J, T6 p$ v7 ]4 Z& u' D
' g2 b, }4 G. v" ^M3.W.1- E. B8 x; j$ M: b! p
8 8 3 May 12 17:34:15 2009
& n5 M+ g' X' ]4 q1 C% zM3.W.1 { @ M3 width < 0.28% C0 ?+ J( q' s" n. {( \. D0 e, y
INT M3 < 0.28 SINGULAR REGION ABUT < 90; J) u( h& ~( {
}
! B* L: K, Z o3 W+ g$ l4 dp 1 34 a6 `) [6 P0 B9 F$ h
205180 235000
, ^( F- ~2 p0 D6 W4 w5 x) [" b4 ]205460 234720
+ ?0 y& w$ a& \2 J. O8 O) j$ _205576 235000
8 e7 p6 Q, U( U6 B( F: x& ?p 2 3
) x7 T- C1 b, v4 C207720 235000
; h8 t: }0 R8 U6 F6 A3 p+ M208000 2347205 P) H: Q; T, x( F
208116 235000
9 A+ b* D" p" t6 x3 _p 3 3
; @5 |: J6 N' m p" Q# [217525 235000
- Y I) p; v0 O# ]217805 234720
) a% C% A% L0 A. U217921 235000( F( Q% E( A0 v5 [
p 4 3
6 `6 }; X$ w# y* q226625 2350000 S+ D/ N' c9 N( k0 R
226905 234720( c) `& C4 O) R' T# D; ]- F% Z
227021 235000* V! R7 {* H0 N4 I
p 5 3
5 }2 M4 J& k6 v$ u- r) _234720 205460
, f4 P k( W9 m* C235000 205180
1 n7 x# L4 r: g- |; u- ^) X235000 205576
& ~9 O4 y& V9 x1 o: w2 Np 6 38 D, P1 A' I! @, ^8 [- |
234720 208000
4 y1 a" J1 t/ S5 ^235000 207720% t( W; a0 {8 r) w8 X9 r9 C7 w2 h
235000 208116$ N! z# V& ^5 l' S6 `
p 7 3
8 h: m3 I; `1 q0 D9 V$ a234720 217805
/ M3 m* J- E, [$ f4 k9 A" [, A0 p235000 217525% o/ a$ `0 m8 t( f
235000 217921% N$ v% W& j3 J
p 8 3
, N9 E0 ^; t7 K( `234720 226905
: Q# w. E+ j8 J235000 226625
- I1 Q) [2 U+ L% _! y; x$ w235000 227021 |
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