Electrically conducting probes with full tungsten cantilever and tip[EPFL]

mt7344

Electrically conducting probes with full tungsten cantilever and tip for scanning probe applications
Abstract
We have developed a new hybrid AFM probe combining an SU-8 polymer
, ~, u; A, ~) L' O, G5 Ebody with a full tungsten cantilever having a nanometric tip. The fabrication
! R) g& ]6 y. Sis based on surface micromachining a silicon wafer, where tungsten is sputter
deposited in oxidation sharpened moulds to yield sharp tips with radius
4 K7 d, x) g& K: g" F8 J( b, a! }, xbelow 20 nm. The material properties of tungsten were measured, yielding a
hardness of 14 GPa, a specific resistivity of 14.8 μ
cm and Young’s
2 {. O  }) T  @* t' D2 pmodulus of 380 GPa. Analyses of the probes show a mechanical quality
factor of 90 in air, and a low contact resistance of 25
on a gold sample is
5 B% \6 R% u1 g9 g, xmeasured. AFM imaging is demonstrated. As a step in the development of a
robust electrically conducting AFM probe, the results are very promising.



  |$ m6 J: G% V( j0 `網路上抓的 paper, 希望對大家有幫助!!
權限10 & RDB=0
  C$ S% `- s& b' P/ v8 t* r0 U- J

遊客，如果您要查看本帖隱藏內容請回復

# y" [% Z# o$ _1 f' X* Y" X

[ 本帖最後由 mt7344 於 2007-6-7 10:12 PM 編輯 ]