An Orthogonal Fluxgate-Type Magnetic Microsensor[EPFL]

mt7344

ABSTRACT
In this paper, we present a new microfabricated
orthogonal fluxgate sensor structure. The sensor
, a& h' ^$ U" b' ~4 _consists of an electroplated copper excitation rod
- [; ]0 j% F. m( W2 P0 hsurrounded by an electroplated permalloy layer and has
" I) m* H9 }# ?9 o% U, Oplanar pick-up coils for signal detection. The use of
. M2 q! f+ M; @$ d; ^electroplating leads to a low-cost fabrication process
and the use of planar pick-up coils provides easy
2 ^# a: R+ e+ e% T2 C& f$ wintegration with CMOS processes. The fabricated
% n. \! v" s$ T9 Nsensor has an excitation independent linear range of
±100 μT, a sensitivity of 280 μV/mT, and an average
power dissipation of 0.8 mW for 30 mA-peak
( t3 N2 \1 _3 V8 D  B/ ?; ssinusoidal excitation current at 100 kHz frequency.
& c, o$ s$ O( I; I5 \, f! d

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