Electrically conducting probes with full tungsten cantilever and tip[EPFL]

mt7344

Electrically conducting probes with full tungsten cantilever and tip for scanning probe applications
% e* v( i4 |* B& w8 s* {Abstract
We have developed a new hybrid AFM probe combining an SU-8 polymer
$ S6 J$ }8 x) u" d  ~/ Ybody with a full tungsten cantilever having a nanometric tip. The fabrication
is based on surface micromachining a silicon wafer, where tungsten is sputter
deposited in oxidation sharpened moulds to yield sharp tips with radius
4 D; t) w' ]0 W/ |below 20 nm. The material properties of tungsten were measured, yielding a
, p, M4 ~4 X) p; Ehardness of 14 GPa, a specific resistivity of 14.8 μ
cm and Young’s
modulus of 380 GPa. Analyses of the probes show a mechanical quality
factor of 90 in air, and a low contact resistance of 25
on a gold sample is
measured. AFM imaging is demonstrated. As a step in the development of a
3 c, g1 f0 x/ N, {7 rrobust electrically conducting AFM probe, the results are very promising.


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- B" ]0 ~0 }  v5 p[ 本帖最後由 mt7344 於 2007-6-7 10:12 PM 編輯 ]