An Orthogonal Fluxgate-Type Magnetic Microsensor[EPFL]

mt7344

ABSTRACT
In this paper, we present a new microfabricated
- y$ t  A/ L6 B* R* Q0 aorthogonal fluxgate sensor structure. The sensor
consists of an electroplated copper excitation rod
surrounded by an electroplated permalloy layer and has
" j- V+ s* L% ~9 l  ?  v) gplanar pick-up coils for signal detection. The use of
5 P! x3 P: r. n! Celectroplating leads to a low-cost fabrication process
and the use of planar pick-up coils provides easy
integration with CMOS processes. The fabricated
7 Z  E2 U" M7 G% Q  Fsensor has an excitation independent linear range of
±100 μT, a sensitivity of 280 μV/mT, and an average
power dissipation of 0.8 mW for 30 mA-peak
sinusoidal excitation current at 100 kHz frequency.
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