An integrated micro-Hall probe for scanning magnetic microscopy[EPFL]

mt7344

Abstract
2 N3 l+ m3 E) yAnewmicrosystem with the ability to detect magnetic microstructures based on the non-invasive Hall principle is presented. The micro-Hall plate embedded in the microsystem and scaled down to the physical limits of the employedCMOStechnology has an active area of only 2.4
m×2.4
m. The microsystem exhibits an output sensitivity of 7.5 V/T in perpendicular direction to the chip surface and a magnetic field resolution of 300 nT/√Hz at 1 Hz. A two-dimensional magnetic scanner was developed to demonstrate the performances of the developed microsystem.
# m/ K$ k7 L+ R7 _. ?

網路上抓的 paper, 希望對大家有幫助!!
權限10 & RDB=3
% `' l  S" n# a
5 V& q0 b) S4 k' H! V9 m6 d
% X$ A5 k5 A) V3 [* ^3 S$ i