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用drc report上的坐標來找error# O" I9 V, n" @* \3 @* f
卻發現error是在corner LL之中; j4 r; N" G7 b1 N- L% b. J' p
如附件圖 970926-1.jpg及970926-2.jpg" s1 F, B* {( U" P
(兩張圖上的2個小白點即是問題所在); _" e0 e( E3 Q: m# H* ^' o
這是在corner LL之中請問這該如何處理呢?
3 S( Y, d7 |, e/ U3 V將calibre drc嵌入astro中,點error坐標也是顯示在 corner LL: e$ R7 b4 B g
已確認過了corner LL沒有任何的線及cell放置。2 ~) c6 F* I7 P- [# u
請各位大大幫幫忙,小弟先在這邊謝謝各位前輩了7 Y, R) M. R1 q- p& T1 z
坐標及error message 如下:
) k$ C; q! R' m3 |$ h' O7 @! RM5.W.1
/ `" i! N, ~& S0 w/ _8 N% C8 8 3 May 12 17:34:49 2009
9 [4 W7 x/ k# x. g- BM5.W.1 { @ M5 width < 0.28
% P3 y7 ~6 q _( U INT M5 < 0.28 SINGULAR REGION ABUT < 90
" N: i( D/ d7 y" e: T}
) K. \3 P9 N/ v, A9 t+ Z% yp 1 3
5 b! [9 L8 `9 C! Z# _8 F; H205180 235000) f' F0 T% q, b* d- W1 G
205460 234720" A1 Y+ I' V6 q, [6 l% g
205576 2350001 H2 ^ J3 U- e& K1 Y- y5 {
p 2 3
" t7 X+ y. N" t- k2 g5 R2 w207720 235000
! e; l2 {) v' U) s5 T208000 234720% Y' E6 ~& `, q" M/ V+ w+ {. U1 u8 {
208116 235000
4 a5 j! Z9 r# M: j' q8 {/ i0 Xp 3 3
2 {4 V: G% u. I217525 235000. j' P* H- |7 H6 ]
217805 234720$ _7 I' c. a0 _# h8 {; w
217921 235000$ X, V8 B v/ h
p 4 3+ u4 r i. E+ ]4 r# L. Y
226625 235000
3 S5 {1 K) v q P% \/ a. `226905 234720
# H4 e8 L; m" u2 {; g0 c227021 235000+ c( }8 H$ N9 G8 I% f1 J7 \
p 5 37 l5 Z6 K$ ]$ i# O9 p
234720 205460
' g; w+ R6 U" K7 P. V! n7 w( [235000 205180" l4 W+ n$ T, c) e. G3 H
235000 205576
4 b+ }1 u7 D% op 6 3! s" j- X3 w( G( h) l' ^ \8 [
234720 208000
# l) p# j4 M8 ?% `235000 207720
# e3 m& V2 H3 M! y235000 208116
+ a6 _+ P! i& mp 7 3
0 x, ]4 d6 o" M! h; h: k1 i234720 217805
+ R" i" i4 b, X1 U235000 217525
3 B' N9 d# f) `2 @% d `2 h" p235000 217921. f- l) R) ~) x! |# z$ T# b# ?3 p
p 8 3, V5 a/ a% U3 M* L: b& [, T
234720 226905& P) A% } n e
235000 226625- m' I6 \+ Y* M0 k7 [5 m- d. k
235000 227021
; {* ]" r# U& J1 @+ D/ E, v+ gM4.W.19 p+ z8 x- @. A% F
8 8 3 May 12 17:34:41 2009 + B% Q- p, E9 v8 Z3 t+ ~7 a: k$ E) K
M4.W.1 { @ M4 width < 0.28
9 v: ~* P& R: R$ e) V8 M R INT M4 < 0.28 SINGULAR REGION ABUT < 909 \' a1 q9 ]2 Y
}+ i4 ]# s% q% j. a% X
p 1 3
' u* g- M& B! X q k* U2 f205180 2350008 N1 ?3 u3 @+ ]" ?! H3 B, L2 D
205460 234720' d$ o9 l5 ^% V I/ A( L
205576 2350001 Z6 J+ L( }5 W7 F5 H, l/ F0 J# e, I
p 2 3
4 ~, O* D+ |6 z7 W0 J9 S: I207720 235000
% p2 r3 \( p9 R4 W208000 2347205 q, C: x+ U/ D6 B7 p5 r( N
208116 235000' q) N1 w4 c8 @$ z
p 3 3
7 p$ `) U* L# [* f; Z! h217525 2350004 y$ V4 [; j# L0 Z
217805 234720% ]) L* U- G" F2 ?# D4 ^; e
217921 235000
1 E, N, B! K( l% b; dp 4 3! U/ y, Y e; m) l- X
226625 2350004 [2 ^" {5 \5 B" s0 P e
226905 234720
0 U3 M$ f9 T, F( }5 j* N227021 235000& [1 d4 |) g: v8 U3 ~( P
p 5 3+ M! \: H1 ]8 P) U
234720 205460! M W+ m& V3 T/ [- ~4 Y- F
235000 205180
* P4 d( T. e" W+ d' h235000 205576+ T ?( C7 D) a9 q
p 6 3
9 {! z" `1 }6 B' x4 K234720 208000
. T9 d: i# d1 a; \: x% Q235000 207720 `. Z5 B* \# w- D8 C9 U
235000 2081161 \9 u3 F" T U0 ?) b) P c/ v
p 7 3
* b/ l4 d- z# ~ Z) \234720 217805- v% ?2 O2 g2 O+ b3 s
235000 217525' X, Q! Y& w3 }( L4 I
235000 217921. i2 R* f4 f( z+ |9 e- l
p 8 3
. _# F/ c1 M8 X4 ~9 C) y234720 226905
0 {9 Q! P) z0 P+ Y3 k9 w( {235000 226625& }8 ?3 n2 d0 j; ?
235000 2270216 s2 v4 ?7 C& k; C" o1 a
# \+ t) y) S) [4 X cM3.W.1
5 A8 ]% W, N( e0 ~9 K4 V% Y. O8 8 3 May 12 17:34:15 2009 ( P: z5 i! Z3 [+ r! X+ y2 n5 G0 K" ]
M3.W.1 { @ M3 width < 0.28
$ C! ]; z' Q% q. W3 o* i% s" Z INT M3 < 0.28 SINGULAR REGION ABUT < 90, `7 S2 l9 V k% \) G
}" p8 D. x9 b( |3 J
p 1 37 X5 f& B7 h/ C, V! s" s
205180 235000. D5 c. Y" H ~* a% g U& H7 b
205460 234720
0 k4 U- G$ v; m7 R. o205576 235000
4 n% w6 Q8 d# q/ _p 2 3+ `( N7 _! i- d9 k1 B
207720 235000
! X0 c( I7 R: R% D+ R0 }208000 234720
9 D/ D8 p$ b6 l1 p208116 2350004 u v7 [! G9 I5 B9 z' `6 L9 ^- I, T
p 3 3
1 c u0 _; b8 T0 ]# H217525 2350004 u" f# P. V) R: N! I. S3 _& k- Y
217805 234720
$ ]1 q( Q% F7 H- W% [. M( V' D217921 235000! z0 h4 | W) L& L# M2 D
p 4 3
/ u7 G9 n5 ?+ z- t5 T& ]) J226625 2350004 U6 S1 u( K1 T2 g
226905 2347204 g: J+ B6 a2 o7 ^0 Y
227021 235000
- O/ Q( E% n6 ?! np 5 3: F4 f/ d' [5 `) F, J% {
234720 205460. o! u( J" [$ M5 j' i
235000 2051809 I- I' w8 K3 y2 j, V9 E
235000 205576
% n+ }" b1 O% a( Fp 6 3
Z, m/ s8 T) e1 c) {234720 208000
2 x* x/ @& Q7 C) ]235000 207720: M4 S2 v4 i2 ]2 |3 Q% b) ]$ [$ K
235000 2081169 P ^& S. h4 N; O9 j) B3 l
p 7 3* b" K/ E {2 X$ z0 V
234720 217805$ |" n1 l9 J Q3 b) l* [5 Y/ U
235000 217525
& F. k7 I9 k' I4 h3 @( X! c235000 2179211 R: T* Q0 k6 b l. A$ b9 L8 B# ~
p 8 3
7 B) n# P5 d9 h }; {( q5 f+ v234720 226905
9 I2 b0 S1 S" e* C+ {: G8 z' k7 y235000 226625: ?0 D5 C. u @ e+ d
235000 227021 |
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