Electrically conducting probes with full tungsten cantilever and tip[EPFL]

mt7344

Electrically conducting probes with full tungsten cantilever and tip for scanning probe applications
4 X$ X$ X8 }/ p6 G1 o$ @& iAbstract
We have developed a new hybrid AFM probe combining an SU-8 polymer
/ x8 T, A: g0 Q4 jbody with a full tungsten cantilever having a nanometric tip. The fabrication
is based on surface micromachining a silicon wafer, where tungsten is sputter
# p, @6 G6 G! f( |/ W, n6 A, F  kdeposited in oxidation sharpened moulds to yield sharp tips with radius
below 20 nm. The material properties of tungsten were measured, yielding a
hardness of 14 GPa, a specific resistivity of 14.8 μ
cm and Young’s
4 c9 V6 o' Q8 Y3 L4 {' p" dmodulus of 380 GPa. Analyses of the probes show a mechanical quality
( I' m9 j  K1 m- s) h/ Z! Ufactor of 90 in air, and a low contact resistance of 25
on a gold sample is
! z* I1 ]) K% Z$ M* c, Lmeasured. AFM imaging is demonstrated. As a step in the development of a
* U9 a' E8 U! H4 }  r- y1 Frobust electrically conducting AFM probe, the results are very promising.

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2 Z! C1 C3 f& h. M4 R2 @網路上抓的 paper, 希望對大家有幫助!!
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# o8 D5 v3 C; w9 f+ U  |8 L[ 本帖最後由 mt7344 於 2007-6-7 10:12 PM 編輯 ]