An Orthogonal Fluxgate-Type Magnetic Microsensor[EPFL]

mt7344

ABSTRACT
7 X$ C. m) C# VIn this paper, we present a new microfabricated
) R( i5 C$ t  f! U  L2 aorthogonal fluxgate sensor structure. The sensor
7 {3 Q" h* t" e4 G8 R% Oconsists of an electroplated copper excitation rod
# z  D! w5 r/ t* @0 N/ R# A( K$ Fsurrounded by an electroplated permalloy layer and has
planar pick-up coils for signal detection. The use of
- t# C! l# A: M! c3 p& M" v4 gelectroplating leads to a low-cost fabrication process
and the use of planar pick-up coils provides easy
integration with CMOS processes. The fabricated
$ j& ~4 |- g6 h3 a0 Rsensor has an excitation independent linear range of
±100 μT, a sensitivity of 280 μV/mT, and an average
power dissipation of 0.8 mW for 30 mA-peak
; P( w0 R1 i# @) _; s- Y  \sinusoidal excitation current at 100 kHz frequency.


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