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用drc report上的坐標來找error1 o+ W+ H U) D5 n, Q
卻發現error是在corner LL之中# `% R$ |6 u( x# f% v$ p
如附件圖 970926-1.jpg及970926-2.jpg
2 p# P) x0 Y) N: g8 T(兩張圖上的2個小白點即是問題所在)
$ y7 ~$ d1 d; z# x' k這是在corner LL之中請問這該如何處理呢?
4 J$ \& N" G' E將calibre drc嵌入astro中,點error坐標也是顯示在 corner LL, u9 t" q- J: [, a4 w
已確認過了corner LL沒有任何的線及cell放置。
5 I+ K; q* E/ i# O; z& p2 o& ]7 B請各位大大幫幫忙,小弟先在這邊謝謝各位前輩了
6 g6 E; C: F; M6 ]坐標及error message 如下:* B2 |" R9 T7 E
M5.W.1 _& X" b: g$ ?/ }$ _( i2 A
8 8 3 May 12 17:34:49 2009
* d8 ?' ^% i/ @9 A+ Q; SM5.W.1 { @ M5 width < 0.28) T0 ^' S) p- P! Z' [& T) m
INT M5 < 0.28 SINGULAR REGION ABUT < 90
% Q/ \: a& N( ]" q% l% [}
/ P1 ^2 a* P$ d- W9 K5 B7 S+ Yp 1 3
/ _& |1 Q% z. J1 O% X4 [6 A4 M( r' h! H205180 2350002 O; C& L! k3 A0 L" U' S: V; O
205460 234720
, L9 N+ d+ m' w205576 235000
1 H ?; A5 G& |. v0 x+ lp 2 3
$ ]: @9 ~1 r+ O8 i" b, [, B, r9 o207720 235000
0 j1 u& p" W. ?' n- [( }2 `9 `+ ~208000 234720
5 D# Q# X. R2 U4 S208116 235000
' W1 I5 T% R6 l7 H, Tp 3 3' F0 j; `7 J* }) Q, D2 Q3 J5 E. Q
217525 235000
% Q1 ^. t* r& q# V217805 234720
" r) p* X1 V. j, O( O" E217921 235000% \0 D( X1 f x! l: f; E
p 4 3
4 d' m* ]/ ~& T! q226625 2350009 [3 m8 r, c9 g! q. h4 M9 o6 J
226905 234720
7 e+ {, \' o8 A6 V+ Q) _227021 235000" w( z* `! {8 k
p 5 3) B3 t1 C8 _, z- N2 Q8 `) t7 b; j
234720 205460
; Q* \8 J& [2 d0 E235000 205180
- S- O' D, @6 u235000 2055763 r2 A0 D4 V- W
p 6 3# L+ P7 v9 ^3 C; F* [& X
234720 208000) t) j% m. `1 F+ ]: S* s; w
235000 207720
) s- |' _8 |% e7 @- E235000 208116
: s/ A, j3 N. Yp 7 3% d, [! l, }% ^' H
234720 217805
1 ~4 \, q9 x, w6 D235000 217525( b1 {' k8 ^6 }/ f. l1 a
235000 2179214 S! \6 M; Y6 Y4 R- ^5 q
p 8 3: j& I% \4 E0 X# O9 J" `2 h. d! o
234720 2269056 W& v" `) o, a" Y
235000 226625
$ R: W5 H+ |3 R3 ^3 u235000 227021
# o& {0 N% ?5 s/ x: M5 g# c( XM4.W.1( @6 Y+ H( m, m2 |7 D4 f
8 8 3 May 12 17:34:41 2009
- X: l$ W3 f) u# i3 XM4.W.1 { @ M4 width < 0.28" P0 Z& d6 ~; _
INT M4 < 0.28 SINGULAR REGION ABUT < 909 c S; y- ]5 u0 H p0 x/ O* Y
}7 I# L8 g+ m) W* y3 W& p4 u" F
p 1 35 z1 n2 W# f- r( A6 |/ x6 D0 l% U
205180 2350001 K# b+ j2 I I* c: x- s# ~
205460 234720
$ ~. _$ v6 [, c4 ]/ ? k- Q205576 2350008 I' w$ \9 D& m8 E8 e+ i+ b
p 2 3
# P/ A5 I' }2 x' Z/ O! ~) }. a# K- E207720 235000
. q- I( @+ U# p$ O) I208000 234720, S* U4 J8 m0 v
208116 235000
: ?* a1 O) D+ j: F) ?$ Fp 3 3
) e) g- W( k* F8 X6 v, K1 s8 f217525 235000
6 p2 g& d) R( @217805 234720
. w' X- g4 W2 P/ o9 `217921 235000% j# }/ a& y, x/ x7 n2 n5 y
p 4 3
; e3 O. a0 e6 g1 Q1 c% P3 w226625 235000" Y- I8 Z* j+ V: b: s0 D' O9 \: \/ i
226905 234720! y& g7 Y Y, S' g0 Z( Y
227021 235000+ u: k# d3 ~& C# |3 z
p 5 3( ~8 G+ j4 G l c# P2 i$ f
234720 205460+ m! _( G( [/ K. N
235000 205180
! E" G/ @" C% F235000 205576
. i" m* M8 S0 `: v7 L# rp 6 3) a6 D2 q$ r5 m0 u
234720 208000
9 l1 s) Q* y% g& Y235000 207720& j! U5 l2 `( z& |
235000 2081166 \) j# l: U. V: z! |! s
p 7 3
9 _0 z! W# ]; W; }9 R, x. @234720 217805
5 _6 S ]% a" L5 H6 s. v; W235000 217525
$ Z, V4 D3 l" E9 ^' x235000 217921
4 E1 l4 l- ^4 X( J2 z! Lp 8 3
$ P& ?; g0 ^1 `/ b234720 2269052 t# l& R# u* F
235000 226625
4 z6 B2 `3 A0 {( f R3 T235000 227021' B2 C+ H: e# j& I, z$ W+ G B
- g3 S8 k) X; C( F$ AM3.W.1+ {% @: Y( Y! R( j
8 8 3 May 12 17:34:15 2009 / a$ ]- ^9 L& c7 U0 o7 f/ x' q
M3.W.1 { @ M3 width < 0.28
. _8 d( ~( y" P8 g' [5 `- k. e- R INT M3 < 0.28 SINGULAR REGION ABUT < 90
1 K- _) F* _) _0 ^}
! R! R( f" \/ \4 i5 X9 Z5 r% Ip 1 3; o5 L; u9 y7 |
205180 2350004 X* ` g& h: J& r2 @& M
205460 234720
8 z3 ]$ V8 ^+ a( k0 M" B2 d205576 235000
3 r! k0 J% B& |+ ~6 v6 Lp 2 3
2 G) y2 e, S& \( k8 \207720 235000/ A% H0 {4 A3 C: O) ~
208000 2347204 e& a" Q+ ]& \$ H; u
208116 235000$ |+ w% v- M* E$ ~) O, M
p 3 35 ^& n8 Z' d, J8 u, P, E
217525 235000. q0 e' u0 l! j5 {, k
217805 2347205 k& M6 G: M! `( d6 e( x' \# T
217921 2350002 S5 Y$ c5 [: q6 s1 y! w& m B, Q; _* p
p 4 38 Q. ^9 a4 b- X9 H. @- {/ e5 g
226625 2350002 G' |% |) B. r+ H8 ~; h
226905 234720) g+ i7 n& s3 Z; X9 H1 }
227021 235000" x5 r9 N+ W7 `$ A" {
p 5 3
. d( }* R' N, h( c( S, h/ ?/ k234720 205460
2 ?/ t# n R# s, i" O3 O235000 2051805 S( a' V' W" R+ W: |4 `
235000 205576, s: G6 B2 D& T1 V6 `
p 6 3
, Q5 k% Z- A# l5 C! z2 C234720 208000- |+ T6 n1 m' b+ o# ~4 [) E
235000 207720: P* N. U# C: B3 @! \
235000 208116* L% [+ ?5 \# T! y. K+ o
p 7 3: j5 g9 y" ~+ c% b6 c. I
234720 217805
0 m8 Y2 k8 [) a235000 217525
. w% f/ e! N! F; F8 I! R235000 217921
9 x) z4 d! `! ]. vp 8 3
- s3 v# j9 p1 D234720 2269051 j* E' z; c1 a3 n; L% A
235000 226625
2 {1 _% l4 v0 i+ l235000 227021 |
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