Electrically conducting probes with full tungsten cantilever and tip[EPFL]

mt7344

Electrically conducting probes with full tungsten cantilever and tip for scanning probe applications
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We have developed a new hybrid AFM probe combining an SU-8 polymer
body with a full tungsten cantilever having a nanometric tip. The fabrication
  p6 p  p9 V+ x: b# B. n' x9 Vis based on surface micromachining a silicon wafer, where tungsten is sputter
4 m: q- o3 f. x3 edeposited in oxidation sharpened moulds to yield sharp tips with radius
below 20 nm. The material properties of tungsten were measured, yielding a
9 t. s1 @+ p1 yhardness of 14 GPa, a specific resistivity of 14.8 μ
cm and Young’s
modulus of 380 GPa. Analyses of the probes show a mechanical quality
' b; z! W# v+ ~2 v" H& d; H. W; a( Pfactor of 90 in air, and a low contact resistance of 25
on a gold sample is
measured. AFM imaging is demonstrated. As a step in the development of a
- E! V! V1 O' @- {5 m1 O4 Yrobust electrically conducting AFM probe, the results are very promising.

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" K" R# Z6 {0 E0 y7 ^% X) f: U7 o* Z# V[ 本帖最後由 mt7344 於 2007-6-7 10:12 PM 編輯 ]