An Orthogonal Fluxgate-Type Magnetic Microsensor[EPFL]

mt7344

ABSTRACT
In this paper, we present a new microfabricated
orthogonal fluxgate sensor structure. The sensor
consists of an electroplated copper excitation rod
: Q3 W. R( t& L: N- k" B# @surrounded by an electroplated permalloy layer and has
/ _- a% O( a+ \planar pick-up coils for signal detection. The use of
& t1 w: ~" B' h! G1 C7 ~; felectroplating leads to a low-cost fabrication process
and the use of planar pick-up coils provides easy
integration with CMOS processes. The fabricated
sensor has an excitation independent linear range of
±100 μT, a sensitivity of 280 μV/mT, and an average
power dissipation of 0.8 mW for 30 mA-peak
( p5 C& {: n5 t) {; O* j9 x- {sinusoidal excitation current at 100 kHz frequency.
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