An Orthogonal Fluxgate-Type Magnetic Microsensor[EPFL]

mt7344

ABSTRACT
5 c- ]& S: }) yIn this paper, we present a new microfabricated
orthogonal fluxgate sensor structure. The sensor
2 J% R) l% U7 b4 Z6 t& O* ]7 ?consists of an electroplated copper excitation rod
. `5 }% Z  X' Q) asurrounded by an electroplated permalloy layer and has
. T" i5 t5 t9 L" M' d( Qplanar pick-up coils for signal detection. The use of
electroplating leads to a low-cost fabrication process
. O+ ^" m- _2 v. N4 {# _& S& P/ Iand the use of planar pick-up coils provides easy
integration with CMOS processes. The fabricated
sensor has an excitation independent linear range of
±100 μT, a sensitivity of 280 μV/mT, and an average
power dissipation of 0.8 mW for 30 mA-peak
3 S! \0 J0 P6 [" n; p( }1 _sinusoidal excitation current at 100 kHz frequency.
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