An integrated micro-Hall probe for scanning magnetic microscopy[EPFL]

mt7344

Abstract
. o( w! ~6 X& ~: t" F7 T5 b2 pAnewmicrosystem with the ability to detect magnetic microstructures based on the non-invasive Hall principle is presented. The micro-Hall plate embedded in the microsystem and scaled down to the physical limits of the employedCMOStechnology has an active area of only 2.4
m×2.4
m. The microsystem exhibits an output sensitivity of 7.5 V/T in perpendicular direction to the chip surface and a magnetic field resolution of 300 nT/√Hz at 1 Hz. A two-dimensional magnetic scanner was developed to demonstrate the performances of the developed microsystem.
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