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用drc report上的坐標來找error" y2 [0 R6 y8 Z6 B% @
卻發現error是在corner LL之中4 c0 E5 H1 ^4 y" d8 n
如附件圖 970926-1.jpg及970926-2.jpg
& e) \/ Z) Z- }; Q(兩張圖上的2個小白點即是問題所在)9 U$ V( Y, E. f# m, e: `) P/ E( V
這是在corner LL之中請問這該如何處理呢?2 \2 \# M g* V- e- g! k
將calibre drc嵌入astro中,點error坐標也是顯示在 corner LL
" N1 W! K T. S$ Q3 x& M已確認過了corner LL沒有任何的線及cell放置。& e2 ^- ~+ h% u; i6 R
請各位大大幫幫忙,小弟先在這邊謝謝各位前輩了
/ a, t j5 J0 h坐標及error message 如下:
% h. i R6 R% mM5.W.1( K5 Z M. A- i: C; }' S9 n6 i) J ]
8 8 3 May 12 17:34:49 2009
; V" o4 L+ b5 z7 SM5.W.1 { @ M5 width < 0.28
0 E' A: c/ s( ^! ^ INT M5 < 0.28 SINGULAR REGION ABUT < 90
) g4 Z9 J6 K- W$ `( f& k- f}
* b2 [; p' X# e, F0 Fp 1 3
. U) _3 e% m4 d4 q( @205180 235000% P K+ T: b- ^0 l
205460 234720
+ z& z H% T" `7 O# i205576 235000
& o Z- r- W1 D/ ^p 2 3
7 ] i$ k# M0 U0 u9 A. ]207720 235000
- v# ?3 b9 Z1 N6 ^$ Q208000 234720
: A8 T }) N8 ?5 J208116 235000
' }$ K0 Q4 [& P3 [p 3 3/ G$ F9 t, ~* _; L
217525 235000# q( E L- z9 Z) R$ b' s U' e6 \
217805 234720
) H8 |) |' t2 |) M217921 235000+ e, `! T- S- ~; I' t% |" N
p 4 3# n, |$ |; @' n0 x- d' \
226625 235000* F* N/ `* S' n# g$ O) f. O6 N7 s$ T
226905 234720
& m3 w4 H9 p' m& d* T227021 235000" p- e8 \, C% e
p 5 3% J: @% f' z9 k/ |% C. ]1 q# N
234720 205460/ T8 m% C+ P" u5 u8 \
235000 205180- J5 L) q, {3 d) a$ f
235000 205576
+ J# O! H* V0 c2 I- \p 6 35 C. r! X; v( Y, D
234720 2080007 p8 K8 h& h2 s6 u0 _
235000 2077207 F4 X2 }1 P& ?! \) S
235000 208116! J3 C" r9 h- i' ^0 c; }
p 7 3
, V) Y* O9 N% ]5 \234720 217805
' G# m5 C+ K) e: Z) U9 o235000 217525/ l" ~5 B D4 }+ x# }
235000 217921 t' T4 ]5 g% j, Y% l
p 8 3
5 B- x ]4 J3 A234720 226905" R) M3 R8 a7 b3 Z7 p# f
235000 2266258 W/ w' u1 {3 j5 w8 A
235000 2270210 b, ?5 U2 J, a; g; ]& |9 o
M4.W.1
9 [" ]9 x/ U$ ?, W. {# D* v8 8 3 May 12 17:34:41 2009 % @$ z2 T3 Q, w6 j3 h( X6 s* @
M4.W.1 { @ M4 width < 0.280 l$ d0 e( {7 d4 ~1 P2 Z/ h# l
INT M4 < 0.28 SINGULAR REGION ABUT < 90# a& d6 F5 m3 h, e" S) E0 w$ |+ A) U
}. _. v- l D& J( @9 t
p 1 30 ?0 ~* x6 F9 V! Z0 P, O
205180 235000
) f2 G4 J; M9 J7 A7 E205460 234720
: o+ N ?9 V' l! H) l3 s% x205576 235000% Y |( I* s, A2 _
p 2 3
, V3 Y& i4 Y+ ~) \0 K207720 235000
0 y8 Z+ @+ Z% J1 B; m" W208000 234720
$ Y7 v$ R; l/ j# ]7 S; K208116 235000
5 f# \6 R9 L& b9 N- |' S% M* g- jp 3 3" D- d3 y+ b# d5 O C
217525 235000 a9 X) u+ z s/ ] C
217805 234720( [* `' _% r; L6 l& A0 ^: [) n/ Z
217921 235000; L9 B$ H# L& n+ l. F5 Q, [
p 4 3
4 ^3 f# V, ]0 v+ Q226625 235000, q% d4 s. B4 W% N! d
226905 2347204 p h7 Z: g& f
227021 235000
# P2 x1 x$ x) d0 v( T# C( l3 \p 5 3
, }+ I; {8 Q- m0 c: }. F* @234720 205460& m( Z( B; B$ `3 V# ~4 q
235000 205180
8 w! c7 S2 B) m: p9 o# D$ t235000 205576
G! b! p9 A6 I5 I! [p 6 3) ?9 R" V# k. m8 }
234720 208000
0 @1 h0 f9 l; f7 ]; |6 `235000 2077207 f+ _0 _$ ^( _) X* y' k$ d
235000 208116$ e6 ^: A6 \. z0 m; t; J. F
p 7 3
8 i& a2 Q; C8 Z234720 217805
# Z5 v1 ?: p0 S8 n235000 217525
2 s! s/ @! o0 g) Z) h4 \- P235000 217921
9 ?6 Z8 e8 d1 f3 V$ R' U0 cp 8 3* P0 @0 y6 H2 P2 ?# q& D
234720 226905! A: N, S) C0 D
235000 226625: O7 }% d0 f$ A) j3 R# o) X
235000 2270217 ?) D9 K* ~0 s/ S, o
, U2 ^: f; z* c* ~) Q) k8 T
M3.W.1
9 i" ~, g1 Y# S M7 j% n, b8 8 3 May 12 17:34:15 2009
" T/ s+ U5 C. q! ^5 sM3.W.1 { @ M3 width < 0.286 a5 d0 A% E% U8 k" ]
INT M3 < 0.28 SINGULAR REGION ABUT < 90
4 p: S! O" g4 C% `}
; z- ` S( m, a1 p& Dp 1 3' S0 U( i+ O1 N6 R' {; u' p
205180 235000
# n7 D$ }) |' A6 l205460 234720; Y, f7 y; b4 ], H
205576 235000" p: G8 d: [* J4 |* I
p 2 3
" y; c& v( X2 F! V1 `2 `* j0 |207720 235000& f5 m: ?/ A+ {' h" M
208000 2347206 w% i! b$ L% Y! j3 P! }& |$ K
208116 235000
% P7 _; s; x1 F( lp 3 3
- k* S+ L9 P7 A. S. D, o217525 235000
, I0 R* G* U% v Y- t217805 234720
$ O( K, W) U+ ]0 e9 q$ M217921 235000
& X6 Y* h5 G. H* ?) F' s( a: Bp 4 34 k! e" ^+ l7 n- ]4 d
226625 235000; r8 P' _9 Z r5 g. j
226905 234720& h6 {: J8 D& j' ?* W1 Q# D9 ~2 l
227021 235000+ t2 B0 M; k- _, [
p 5 3
; j7 {+ E$ R) @/ G5 Y; v7 A: T+ x234720 205460
; i2 p7 U q2 i% k5 \235000 2051801 ^# m! w# O$ S R8 x" s$ @
235000 205576. U" U: p1 a5 [4 V5 [
p 6 3
5 [; a; C1 M: a' l8 z2 S' K234720 208000
- m3 v1 g) Z% R( y$ T235000 207720
. G) w! D5 e! D, t8 s9 @! L3 A. ~235000 208116( t9 e r9 m; F. {- m5 T+ _
p 7 3 ~: U1 p! s$ C
234720 217805
( t& u& ~2 Y7 t& h235000 217525
* K: ]. |/ K! z- k$ S) Y235000 217921' F/ b! q, F9 D& Z. V: t" x# Q
p 8 3* C4 x5 E& P/ s- _/ |! T
234720 226905! @9 {6 _; A" q& f B* `
235000 226625& @, n& I6 J+ ?0 j
235000 227021 |
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