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用drc report上的坐標來找error4 `* e6 y$ K! e" d8 L: f
卻發現error是在corner LL之中* Q" J' p Z0 i; w7 u" [/ O
如附件圖 970926-1.jpg及970926-2.jpg
6 @& |6 k" _: k* v. b7 S+ [& H(兩張圖上的2個小白點即是問題所在)) L( w" D8 S: e8 x
這是在corner LL之中請問這該如何處理呢? H) o9 \" u$ M
將calibre drc嵌入astro中,點error坐標也是顯示在 corner LL
0 n5 e) ^* @2 z$ v) q已確認過了corner LL沒有任何的線及cell放置。% L) O# C$ }' N H
請各位大大幫幫忙,小弟先在這邊謝謝各位前輩了
+ _5 |! [7 ?# `4 _! v: g坐標及error message 如下:
; ~8 V" X4 ]: U1 BM5.W.1) m2 J9 ~5 @# P* W) m
8 8 3 May 12 17:34:49 2009
( q7 Z/ k7 p. l: a- bM5.W.1 { @ M5 width < 0.283 C, S; }2 r3 q% O- p
INT M5 < 0.28 SINGULAR REGION ABUT < 90
$ P; ]! w0 B; ]. D& I* O% j}
' ~' X0 X2 C2 {. j6 Z/ op 1 3
1 j6 x4 e/ ]& k2 R# {" C205180 235000
. Q5 ^9 H/ p/ ?7 | ~205460 234720
. V/ z0 _& m# ~: c, d* I( f2 s205576 235000
# f, \' i; Q1 p! M0 P1 O- ^2 ~p 2 3( d1 _. W2 e2 ]
207720 235000
. ^3 }4 u: F+ [0 s$ V9 y208000 2347207 V! {8 e& q W
208116 235000. e! o2 S; z8 W% y+ \, C' j
p 3 3
, u+ X# c4 ?$ \; W6 a% s6 S* i217525 235000/ c* }% v4 ~4 i1 c" V
217805 234720) i, n7 j' I( }' l7 {& Y
217921 2350002 L! J1 H7 I$ R- m% L
p 4 3! z: ?2 h% e3 d
226625 2350007 x+ G; U2 O9 p: r
226905 234720
& f) i5 K* N0 {227021 2350000 G# l( ^1 C0 I. U
p 5 3
2 J, s8 m# V- S1 J" G$ |1 [234720 205460
' W Y8 Q" v e- \+ o0 M8 A' d235000 205180* k/ Z, D: }# Y4 [! Q- Y7 C
235000 205576( Y- z5 ]* l. V8 a3 I- [
p 6 3
3 `- M6 i$ k7 D+ C7 n234720 208000' ?0 Y+ ^- ]7 ?
235000 207720
" X. @9 R# Z, l235000 208116
# ~' r9 S4 ]& M3 H" P- |p 7 3) t% O m, W/ m
234720 217805" U: ?& l9 f+ J+ d
235000 2175257 Y* c! X3 D- V& w! y7 G- V4 g# j
235000 217921
& h4 i) @5 A3 {% E3 B0 i. np 8 3
/ n- W1 Y* X8 _; T) T: _4 |234720 226905' E" X3 s O4 e z8 @9 S- M$ {5 M/ d
235000 226625
$ w F _$ l8 e2 b( |7 A9 f235000 227021" K! j; E3 @: |# T& q& ~
M4.W.1" e$ S7 W5 H3 \0 a/ H0 N, C" W
8 8 3 May 12 17:34:41 2009
9 `8 s" U I; a! d4 \. CM4.W.1 { @ M4 width < 0.28
% O( N5 R4 R+ c& {" Y INT M4 < 0.28 SINGULAR REGION ABUT < 90: p8 H( ~ D9 v4 |0 _& U
}7 E% i8 c9 I2 f: [) O1 }$ z1 T( @( G
p 1 3
! j0 ], T8 ?* p5 i, a( D m: E/ j205180 235000& z$ j/ B! Q) I) h# G. n" H
205460 234720
$ V( P% f% i+ l7 }. Q# K205576 235000
0 Q K+ ~) Q& @+ a% ]p 2 3
' W5 Q- l: q' W8 ~207720 235000
5 w+ R6 K- b$ O9 @8 d208000 2347208 X5 x6 o, t7 E5 ~. i- e
208116 235000
' O0 L6 J1 ~: j$ [p 3 3
8 l0 q- `7 D. ? h7 a m9 H217525 2350007 j, T$ f' M# x4 {$ P, |
217805 234720
# @$ @5 ?' Z" k; W0 r K217921 235000
' R7 |) R: b2 W1 Q9 j9 S- y# ]4 Q! zp 4 38 T5 k9 l( K- R& N7 a' y. h1 C
226625 235000* j: T( ~3 W1 g" s! K4 l
226905 234720
& u: O( ^( _% G227021 235000$ `3 l# \0 _" C2 x7 W/ [3 c
p 5 3
# v7 K) ~# _( e: M7 I6 x234720 205460+ p% {9 O( u3 Q( M4 n1 G5 b
235000 205180; v) s/ j0 X) t0 W: b6 d |( z
235000 205576
/ @1 a% k& c* b D/ C6 Gp 6 3
+ j) W8 Q8 ~' w' q! Q0 y" u234720 208000
" C* b1 Y; S4 E235000 207720* h8 r% s' [. S, Z* o
235000 208116
- e8 B+ p" n. F; [& I# Gp 7 3( x9 e; q0 R- p) }1 Y% k
234720 217805+ e" d! |" h- a- G4 \6 X) |
235000 2175252 L' ]& s4 [) ^$ [
235000 2179212 W4 Y' Q5 A. C( Q+ F
p 8 3
0 |) c4 z! Y/ Q0 Q- j234720 226905$ T( t, ]4 l) _6 N
235000 226625; m* X9 P# P- y. a. m
235000 227021
5 U3 l6 m/ [5 p9 p
, f( ` b$ ?, QM3.W.1
8 [7 [: O/ Q" P) U* x7 u. F8 8 3 May 12 17:34:15 2009 + C) L1 [8 t8 R. I" Q2 L0 [
M3.W.1 { @ M3 width < 0.28
2 e- C( x; c! ~9 Q5 y @% T INT M3 < 0.28 SINGULAR REGION ABUT < 90. D- E3 w9 e6 s9 B0 q2 [
}
8 u* y- B" g! L# a- a+ H0 Vp 1 3
$ s" |+ C D% ^5 u205180 235000
; f& \6 [2 w; Q2 ]$ m* N205460 2347208 y- |. z1 ^! x; Q0 k
205576 235000
' c O9 K; z2 K9 D; E" Y* \p 2 3
# r; u! B- k2 D* g7 W9 H6 l207720 235000
* r* u) p9 ~6 W; `208000 234720 c, A. q1 j7 }9 S7 Q. k
208116 235000+ o5 `8 B) i4 k2 Y
p 3 3: E2 x1 D( V. T- f+ Y: Q
217525 2350000 D2 \" [9 I9 m& Q. \1 d" l2 f1 g
217805 234720
]% k& ~' ^) I217921 235000
$ p( O0 e' K: e2 R; Fp 4 37 U+ q$ n0 H) v; _2 g3 B
226625 2350004 h S8 K8 d& |( V" I7 s
226905 2347204 \3 C/ `4 z/ q" V: C) j: V0 |% T
227021 235000& o& v: O+ c6 y& _) C" \
p 5 3
" D3 H4 g8 K( l& C234720 2054604 D! G* D/ C/ U2 Y+ b
235000 2051800 k q, s' W4 z$ t) B' P4 Z
235000 205576$ w4 p8 d7 A4 e2 p$ O+ l
p 6 3
% Q3 T' |" t( r4 r. m. @& q234720 208000
/ q; P0 q6 J' j: x235000 207720
0 p. I: ~# |% G; [6 }/ Z. b1 G235000 208116/ p! A* c x* C
p 7 3- }% l: S2 [5 I$ i* G5 n+ j
234720 217805
) ` q7 N) d1 t) W: x235000 217525) y( j/ B1 e4 s6 M F3 i! m3 y
235000 217921: |; o7 Z9 M$ j* V+ A7 K
p 8 3
4 r" e! ]8 H* C( [; \/ i234720 226905# I. P1 T+ Z4 w+ @( g& s
235000 2266255 {* r7 ]3 t3 F
235000 227021 |
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