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請問各位大大5 a7 U# U4 Y+ _0 P: i; b" B
我用TSMC18的design kit作cell-based layout的練習,軟體是用encounter,大部分的步驟是依照CIC所提供的Lab去做,完成之後用我的GDS檔去做DRC,會出現下列的DRC ERROR,而且是M1~M5、via1~via5都會有這方面的error,因為error的數目頗大,不太可能用人工去debug,所以我想請問有經驗的大大們,能不能告訴我最大的問題點在哪裡?以及這些錯誤代表什麼?要如何debug比較適合?
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先謝謝各位大大了!!感激不盡!!
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. \3 F5 _$ G' x' |1. M2.W.1 { @ M2 width < 0.28' B- G$ v+ }2 S3 X: f0 t
INT M2 < 0.28 SINGULAR REGION ABUT < 90) |; m H$ C) ~, x: w: U2 }
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( f* X3 F' \- j4 K) c7 Q- u4 y2. M2.S.1 { @ M2 spacing < 0.28
4 X; W3 v$ D: r3 P! ]5 L EXT M2 < 0.28 ABUT < 90 SINGULAR REGION* b/ W8 \) Q6 C+ p% S0 x
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3. M2.S.2 { @ Wide M2 (>10um) min. to M2 < 0.6 um$ |$ h) H i7 R \' L, y
M2_S5 = SHRINK (SHRINK (SHRINK (SHRINK M2 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 5( h5 X& U( b6 l8 q
M2_G5 = GROW (GROW (GROW (GROW M2_S5 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 53 n! t$ f, d8 O5 e) ?- ?- g
M2_Wide = M2_G5 AND M2
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: ], R) }( z6 ?2 f- m& s+ p! @ M2_Exp = SIZE M2_Wide BY 1 INSIDE OF M2 STEP 0.196$ Y- L1 X/ _# P. |: m
M2_Branch = M2_Exp NOT M2_Wide2 S( M m1 P" y' H+ U) _/ D
M2_Branch_edge = M2_Branch COIN INSIDE EDGE M2
* P- M( t# g! O2 Z$ X/ z/ Y M2_Check = M2 AND (SIZE M2_Exp BY 0.6)
4 Y" X# M* \ ?) ?5 ?& J5 q M2_Else = M2_Check NOT INTERACT M2_Exp" `4 ?. H2 `; a* ?/ n
M2_Extend = M2_Check NOT M2_Exp " l5 v) o8 a- h. P. k
& ]) b5 K0 \" y! J EXT M2_Wide M2_Else < 0.6 ABUT >0 <89.5 REGION% y. W3 [$ M8 \. d
EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 OPPOSITE REGION
2 M9 q. o8 q( {8 l. E3 L EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 CORNER REGION
8 j4 }8 w! n- k% ~& q4 c EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 PROJ==0 REGION* N' ~. O* a7 z/ B/ l
A = EXT M2_Exp < 0.6 ABUT > 0 < 89.5 SPACE REGION* i' R. C9 _% C1 _# K* j
A NOT INTERACT M2_Extend
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4. M2.E.1 { @ Min extension of a M2 region beyond a VIA1 region is 0.01 um7 K: T- R# S9 }( Z6 E r/ C
ENC VIA1 M2 < 0.01 ABUT<90 SINGULAR
2 ?8 n2 ]( ?* U) { ` VIA1 NOT M2 7 G# d# z9 P1 p
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5. M2.E.2 { @ Min extension of M2 end-of-line region beyond VIA1 region is 0.06um/ ]4 E! @% n5 W' U
X = ENC [VIA1] M2 < 0.06 ABUT < 90 OPPOSITE // a narrow side5 S1 i8 @1 z5 t( z( T2 R
INT X < 0.26 ABUT == 90 INTERSECTING ONLY // adjacent narrow sides
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' P4 V& O( o0 g. Y6. M2.A.1{ @ Min M2 area region < 0.202
( m' N0 O% I0 ?. J5 y* m AREA M2 < 0.2029 ~% ^) R1 ^/ g4 A
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// Density check M2.R.1 included at the end of this file5 f% x, U' Y' R% g% K& u; F" \
// VIA2 checks
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5 \; k9 `2 j! H. b: e7. VIA2.W.1 { @ VIA2 must be 0.26 x 0.26 um
1 Q" }& q3 o- w/ f A = NOT RECTANGLE VIA2 == 0.26 BY == 0.26 ORTHOGONAL ONLY
+ c6 I$ w4 J |# V5 w# G A OUTSIDE RNGX // exclude from metal fuse protection ring area! C V- ]2 r* c8 i% G# ?
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8. VIA2.S.1 { @ VIA2 SPACING < 0.261 \" D4 U ?4 t; [% J
EXT VIA2 < 0.26 ABUT < 90 SINGULAR REGION $ `3 c1 O3 ?$ `; r3 ` x( q% p1 \
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9. VIA2.E.1 { @ Min extension of a M2 region beyond a VIA2 region is 0.01 um/ R& C) ]1 L6 |7 r+ }
ENC VIA2 M2 < 0.01 ABUT<90 SINGULAR
/ b& G( S, p) q/ M VIA2 NOT M2
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10. VIA2.E.2 { @ Min extension of M2 end-of-line region beyond VIA2 region is 0.06 um
- F4 f4 x2 k9 n' J% \0 Z X = ENC [VIA2] M2 < 0.06 ABUT < 90 OPPOSITE // a narrow side, D. D9 b- g# }7 t$ H, [
INT X < 0.26 ABUT == 90 INTERSECTING ONLY // adjacent narrow sides% @( N; n c% L- D; C$ J
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