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[問題求助] Wafer Surface Profiler 晶圓表面形貌量測系統???

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發表於 2018-9-11 18:13:26 | 顯示全部樓層 |閱讀模式
Wafer surface profiler is based on the measurement principle of optical deflectometry.

The fringe images on the wafer are reflected from a projection screen and captured by the CCD camera.
Wafer slope / profile / warpage / bow / stress can be determined by implementing the phase shift algorithm and analyzing the fringe deformation.


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