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An orthogonal fluxgate-type magnetic microsensor with electroplated Permalloy core[EPFL]9 W* [3 z2 v B G
5 H0 T' E7 U! P3 ?% EAbstract
( W4 s) k6 [" q% yIn this paper, we present a new microfabricated orthogonal fluxgate sensor structure. The sensor consists of an electroplated copper excitation rod surrounded by an electroplated Permalloy layer and has planar pick-up coils for signal detection. The use of electroplating leads to a low-cost fabrication process and the use of planar pick-up coils provides easy integration with CMOS processes. The fabricated sensor has an excitation independent linear range of ±200T, a sensitivity of 510 V/mT, and an average power dissipation of 8.1mW for 100 mA-peak sinusoidal excitation current at 100 kHz frequency. The equivalent magnetic noise is 95 nT/√Hz at 1 Hz, and the RMS noise is 215 nT for 10 Hz bandwidth.7 R: H3 @7 D0 ?3 Y: J
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