magnetic microsensor with electroplated Permalloy core[EPFL]

mt7344

An orthogonal fluxgate-type magnetic microsensor with electroplated Permalloy core[EPFL]

* w% U' M. A- Q* F# @Abstract
% ^% T8 A9 w6 y/ {5 C$ GIn this paper, we present a new microfabricated orthogonal fluxgate sensor structure. The sensor consists of an electroplated copper excitation rod surrounded by an electroplated Permalloy layer and has planar pick-up coils for signal detection. The use of electroplating leads to a low-cost fabrication process and the use of planar pick-up coils provides easy integration with CMOS processes. The fabricated sensor has an excitation independent linear range of ±200T, a sensitivity of 510 V/mT, and an average power dissipation of 8.1mW for 100 mA-peak sinusoidal excitation current at 100 kHz frequency. The equivalent magnetic noise is 95 nT/√Hz at 1 Hz, and the RMS noise is 215 nT for 10 Hz bandwidth.
" f5 d5 T6 }- s7 f- q$ G: p
2 `8 m- w" L5 S/ x  t
7 L  x1 X) [# _* Q& \8 F. p網路上抓的!  若有版權問題  請版主刪除!
9 ]6 }- U* A) o; x: z. tPDF 7 PAGES file!