關於cell-based 流程的DRC問題

ywchywch

請問各位大大
+ I, L  E) v+ ]我用TSMC18的design kit作cell-based layout的練習，軟體是用encounter，大部分的步驟是依照CIC所提供的Lab去做，完成之後用我的GDS檔去做DRC，會出現下列的DRC ERROR，而且是M1~M5、via1~via5都會有這方面的error，因為error的數目頗大，不太可能用人工去debug，所以我想請問有經驗的大大們，能不能告訴我最大的問題點在哪裡？以及這些錯誤代表什麼？要如何debug比較適合？
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# L! b# }+ F  `: r  [1 B+ P0 j先謝謝各位大大了!!感激不盡!!

1. M2.W.1 { @ M2 width < 0.28
( g5 m& U! Z( V4 P! M  INT M2 < 0.28 SINGULAR REGION ABUT < 90
}

) {, E+ ]* K# ~  I9 _. Q( L! `2. M2.S.1 { @ M2 spacing < 0.28
  EXT M2 < 0.28 ABUT < 90 SINGULAR REGION
}

3. M2.S.2 { @ Wide M2 (>10um) min. to M2 < 0.6 um
4 w2 O" C. D! W% t& Z2 Z# b% ]% r. h  M2_S5 = SHRINK (SHRINK (SHRINK (SHRINK M2 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 5
  M2_G5 = GROW (GROW (GROW (GROW M2_S5 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 5
  M2_Wide = M2_G5 AND M2

  M2_Exp = SIZE M2_Wide BY 1 INSIDE OF M2 STEP 0.196
  M2_Branch = M2_Exp NOT M2_Wide
  M2_Branch_edge = M2_Branch COIN INSIDE EDGE M2
  M2_Check = M2 AND (SIZE M2_Exp BY 0.6)
  M2_Else = M2_Check NOT INTERACT M2_Exp
  M2_Extend = M2_Check NOT M2_Exp

- V' S2 i- |! b! B" D; ^8 p2 n  EXT M2_Wide M2_Else < 0.6 ABUT >0 <89.5 REGION
9 U$ J8 O: _: q8 w  EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 OPPOSITE REGION
  EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 CORNER REGION
4 V* @" ^  A7 x  EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 PROJ==0 REGION
  A = EXT M2_Exp < 0.6 ABUT > 0 < 89.5 SPACE REGION
' z, ~% r) }0 a  g- C$ ~3 h  A NOT INTERACT M2_Extend
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4. M2.E.1 { @ Min extension of a M2 region beyond a VIA1 region is 0.01 um
( S* `; I+ S! y0 h   ENC VIA1 M2 < 0.01 ABUT<90 SINGULAR
4 |2 j2 \: _% ~# P% y! U   VIA1 NOT M2   
}

, S0 }1 a# ?& d, `8 h* I+ [9 I- Q5. M2.E.2 { @ Min extension of M2 end-of-line region beyond VIA1 region is 0.06um
   X = ENC [VIA1] M2 < 0.06 ABUT < 90 OPPOSITE                // a narrow side
   INT X < 0.26 ABUT == 90 INTERSECTING ONLY       // adjacent narrow sides
}

) ?7 R' ^, |( d) e  s0 L6. M2.A.1{ @ Min M2 area region < 0.202
+ X# j! s# t( ?: W  AREA M2 < 0.202
}
! W/ w, {, x) Q: d. y& W// Density check M2.R.1 included at the end of this file
3 {# f' x2 ^9 {# a! Z, ]// VIA2 checks
. I) s3 c; J( F1 p3 o: M% @//=============
, z( V/ _3 w0 O& x  `: V  J
" F5 b# J: U8 p" |' a! T$ I7. VIA2.W.1 { @ VIA2 must be 0.26 x 0.26 um
  A = NOT RECTANGLE VIA2 == 0.26 BY == 0.26 ORTHOGONAL ONLY
; t7 M# U! v3 s) N4 P7 ~5 H  A OUTSIDE RNGX   // exclude from metal fuse protection ring area
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. `$ X. h. b9 X( f1 p. s& @
+ _8 [7 J1 C* D8. VIA2.S.1 { @ VIA2 SPACING < 0.26
8 F3 n. y0 R$ a  EXT VIA2 < 0.26 ABUT < 90 SINGULAR REGION
2 R& \3 \! L; S}

9. VIA2.E.1 { @ Min extension of a M2 region beyond a VIA2 region is 0.01 um
/ x  p* O2 a  i6 ^- d' I: J2 C+ E  ENC VIA2 M2 < 0.01 ABUT<90 SINGULAR
  VIA2 NOT M2   
}
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5 `9 U5 M6 U9 W4 B! s; N10. VIA2.E.2 { @ Min extension of M2 end-of-line region beyond VIA2 region is 0.06 um
   X = ENC [VIA2] M2 < 0.06 ABUT < 90 OPPOSITE         // a narrow side
! r2 h8 \) \; }1 Y   INT X < 0.26  ABUT == 90 INTERSECTING ONLY     // adjacent narrow sides
  z+ y2 ^; `3 _( ^6 A: `, W- X}

motofatfat

我猜你試用APR軟體RUN出來ㄉ
應該是相同NET ㄉMetal space 和 via extension
3 h. [0 P, \% C# N; x' f/ ?& L: ?不夠的問題,通常會用 skill file 來修正

michael6172

我覺得你打電話去CIC問工程師會比較快吧 ...