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Blowing Polysilicon Fuses What Conditions are Best.pdf
原帖由 hyseresis 於 2008-12-3 12:07 PM 發表 ! o: b1 w; d! N
Blowing Polysilicon Fuses What Conditions are Best.pdf2 G9 T$ Z6 l! \* A
BLOWING POLYSILICON FUSES: WHAT CONDITIONS ARE BEST?
; b7 ~! I3 R, N2 b3 j給大家參考 " d' U" O2 t% \' l$ X& _2 D
ABSTRACT
+ N9 I- R7 [' X: c1 bA study has been conducted to understand polysilicon fuse blow- m: ~' @8 s! \
mechanisms and determine optimized blow conditions. The
) Q! R" T; s6 ^* a7 y0 Z- W: Ccorrelation of optical microscope images, cross section SEM
( W. F, E' F0 B5 B, Y7 F8 P(Scanning Electron Microscope) images, and electrical waveforms of0 G2 a0 ?" D9 Q' g9 t
fuses blown at different voltages revealed two different blow8 X, q+ o5 d& e' T
mechanisms. Furthermore, SEM images of fuses blown using
7 y8 O# e3 E- r0 N4 V i' y0 Fdifferent pulse widths showed the physical changes of fuses during
& \: b, }5 N7 r. e, e! Lthe fuse blow process.
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[ 本帖最後由 hyseresis 於 2008-12-3 01:18 PM 編輯 ] |
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