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Design for Manufacturability and Yield for Nano-Scale CMOS (Series on Integrated Circuits and Systems) (Hardcover)by Charles Chiang (Author), Jamil Kawa (Author)
! y% j, q) \1 m# PKey Phrases: open critical area, final thickness range, defect size distribution function, Model Based Dummy Filling, Improving Critical Area, Practical Application (more...)
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: ]- _. ]& m: S4 Y3 Q2 x (1 customer review) . @# t0 m' }6 U, X; @) P
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