An Orthogonal Fluxgate-Type Magnetic Microsensor[EPFL]

mt7344

ABSTRACT
In this paper, we present a new microfabricated
orthogonal fluxgate sensor structure. The sensor
consists of an electroplated copper excitation rod
surrounded by an electroplated permalloy layer and has
' w1 f% R4 u8 Splanar pick-up coils for signal detection. The use of
electroplating leads to a low-cost fabrication process
) i& Q- h+ O# qand the use of planar pick-up coils provides easy
integration with CMOS processes. The fabricated
sensor has an excitation independent linear range of
9 w& \9 L, L" |0 \- p( c9 Z* K; b9 [5 v. k±100 μT, a sensitivity of 280 μV/mT, and an average
) |! A6 }  q4 X9 u' W9 h( ppower dissipation of 0.8 mW for 30 mA-peak
sinusoidal excitation current at 100 kHz frequency.
& @7 z! W' e' M& z
9 l$ Z9 n2 ]% u3 M# o4 T
網路上抓的 paper, 希望對大家有幫助!!
: Y$ C; t4 ~+ }9 P" M2 u1 L權限10 & RDB=3