Wafer Surface Profiler 晶圓表面形貌量測系統???

SophieWeng@G

Wafer surface profiler is based on the measurement principle of optical deflectometry.

The fringe images on the wafer are reflected from a projection screen and captured by the CCD camera.
Wafer slope / profile / warpage / bow / stress can be determined by implementing the phase shift algorithm and analyzing the fringe deformation.