關於cell-based 流程的DRC問題

ywchywch

請問各位大大
我用TSMC18的design kit作cell-based layout的練習，軟體是用encounter，大部分的步驟是依照CIC所提供的Lab去做，完成之後用我的GDS檔去做DRC，會出現下列的DRC ERROR，而且是M1~M5、via1~via5都會有這方面的error，因為error的數目頗大，不太可能用人工去debug，所以我想請問有經驗的大大們，能不能告訴我最大的問題點在哪裡？以及這些錯誤代表什麼？要如何debug比較適合？

先謝謝各位大大了!!感激不盡!!
* v* X9 K' V* Y" m- B! @
" I6 {3 u0 g: I* a$ J: p5 E6 S+ u1. M2.W.1 { @ M2 width < 0.28
  INT M2 < 0.28 SINGULAR REGION ABUT < 90
9 W: t. ^; z7 m4 g2 U3 o8 l}
; ]8 m* i, y- \* K2 z' |
& Z; E* b  B0 G2. M2.S.1 { @ M2 spacing < 0.28
" ?! k- C& d9 S! `  EXT M2 < 0.28 ABUT < 90 SINGULAR REGION
}

3. M2.S.2 { @ Wide M2 (>10um) min. to M2 < 0.6 um
  M2_S5 = SHRINK (SHRINK (SHRINK (SHRINK M2 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 5
" k& v0 n( m5 P, D  M2_G5 = GROW (GROW (GROW (GROW M2_S5 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 5
  M2_Wide = M2_G5 AND M2
0 _2 e& l0 K- D& `7 d
  M2_Exp = SIZE M2_Wide BY 1 INSIDE OF M2 STEP 0.196
& P. ^7 v# M2 d. U- K: |. V( @  M2_Branch = M2_Exp NOT M2_Wide
  M2_Branch_edge = M2_Branch COIN INSIDE EDGE M2
: N+ d8 l: ?) g% Q& {  M2_Check = M2 AND (SIZE M2_Exp BY 0.6)
6 u; {1 f- O) I  M2_Else = M2_Check NOT INTERACT M2_Exp
+ a7 j8 G! i* \3 Z; v( y# a  M2_Extend = M2_Check NOT M2_Exp
. c$ u$ @+ U# {6 \* I) E- N( O5 X
1 _0 f* d$ [: {6 J  EXT M2_Wide M2_Else < 0.6 ABUT >0 <89.5 REGION
4 t  q, ?) U% R# l+ c* A  EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 OPPOSITE REGION
  EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 CORNER REGION
  EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 PROJ==0 REGION
5 f$ ^. X4 F6 ^  A = EXT M2_Exp < 0.6 ABUT > 0 < 89.5 SPACE REGION
  A NOT INTERACT M2_Extend
. Z; n3 E& C4 F. G}
4. M2.E.1 { @ Min extension of a M2 region beyond a VIA1 region is 0.01 um
   ENC VIA1 M2 < 0.01 ABUT<90 SINGULAR
: @( J: e& ]! S6 m  k   VIA1 NOT M2   
}
+ ^6 R7 S) u* \
( ^3 W& M, X9 p( k3 D! y5. M2.E.2 { @ Min extension of M2 end-of-line region beyond VIA1 region is 0.06um
   X = ENC [VIA1] M2 < 0.06 ABUT < 90 OPPOSITE                // a narrow side
7 k5 c2 L- A$ N5 `   INT X < 0.26 ABUT == 90 INTERSECTING ONLY       // adjacent narrow sides
}

6. M2.A.1{ @ Min M2 area region < 0.202
+ J  l0 c& O) g- b- B' B  AREA M2 < 0.202
}
// Density check M2.R.1 included at the end of this file
// VIA2 checks
8 w7 d; h6 G" p4 T9 u0 p0 }//=============
8 m+ n9 _$ \1 A0 R- `3 ^* r
7. VIA2.W.1 { @ VIA2 must be 0.26 x 0.26 um
/ `# n, s" Q! ]2 u1 `# i( [# n/ I7 Z  A = NOT RECTANGLE VIA2 == 0.26 BY == 0.26 ORTHOGONAL ONLY
& K& ~: \+ e4 t$ p7 P, N2 Y, U  A OUTSIDE RNGX   // exclude from metal fuse protection ring area
}
) O) ^) G7 }: e( O* z
8 z' D0 i: @- t. Y$ z8. VIA2.S.1 { @ VIA2 SPACING < 0.26
  EXT VIA2 < 0.26 ABUT < 90 SINGULAR REGION
}
! `4 y- C  ~7 ~7 m
8 z5 ]+ F  P" L. k' ?! d9. VIA2.E.1 { @ Min extension of a M2 region beyond a VIA2 region is 0.01 um
& R" c' L6 a0 p% k/ l  ENC VIA2 M2 < 0.01 ABUT<90 SINGULAR
* G/ i" u/ l5 H- p2 X5 \  VIA2 NOT M2   
' V& M, M& `7 {" c}
+ o3 ~! z4 A; L
10. VIA2.E.2 { @ Min extension of M2 end-of-line region beyond VIA2 region is 0.06 um
& P" O( d3 z* _! h" R' Z% {) ^6 f   X = ENC [VIA2] M2 < 0.06 ABUT < 90 OPPOSITE         // a narrow side
+ d/ f$ y3 z2 s; H0 |' D7 Q7 R( U9 b$ _   INT X < 0.26  ABUT == 90 INTERSECTING ONLY     // adjacent narrow sides
6 S; M7 o% N0 ]}