標題: Electrically conducting probes with full tungsten cantilever and tip[EPFL] [打印本頁] 作者: mt7344 時間: 2007-6-7 10:10 PM 標題: Electrically conducting probes with full tungsten cantilever and tip[EPFL] Electrically conducting probes with full tungsten cantilever and tip for scanning probe applications w( e+ j9 y3 _6 y' V; R4 D4 R
Abstract * I2 _6 o3 [, e- l7 ]7 n# hWe have developed a new hybrid AFM probe combining an SU-8 polymer ) n# n8 s! N: c/ q. r" W# sbody with a full tungsten cantilever having a nanometric tip. The fabrication 8 W4 `- R5 a4 d6 U9 N6 p% Tis based on surface micromachining a silicon wafer, where tungsten is sputter 8 j8 h9 Z0 z# z( d% m) o/ Wdeposited in oxidation sharpened moulds to yield sharp tips with radius 4 R& ]" N/ N; xbelow 20 nm. The material properties of tungsten were measured, yielding a 7 D: P- S$ I% A. B }hardness of 14 GPa, a specific resistivity of 14.8 μ cm and Young’s9 @' [, d7 v7 k+ B% E* q( g
modulus of 380 GPa. Analyses of the probes show a mechanical quality 5 ~6 S4 W4 k/ Gfactor of 90 in air, and a low contact resistance of 25 on a gold sample is ( Z7 m0 f F: i# z& G9 |measured. AFM imaging is demonstrated. As a step in the development of a " g# \6 u2 H# o z) O: Hrobust electrically conducting AFM probe, the results are very promising.: b% ?( r2 v9 X
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