標題: An Orthogonal Fluxgate-Type Magnetic Microsensor[EPFL] [打印本頁] 作者: mt7344 時間: 2007-6-6 10:44 PM 標題: An Orthogonal Fluxgate-Type Magnetic Microsensor[EPFL] ABSTRACT7 r+ ?" b/ n4 r1 F
In this paper, we present a new microfabricated : A* i" v3 r3 K4 ~+ m2 I9 Jorthogonal fluxgate sensor structure. The sensor 0 t, I$ E& ~8 o. tconsists of an electroplated copper excitation rod" C7 u; u) z! B0 y5 |3 Z6 P# ~
surrounded by an electroplated permalloy layer and has/ v4 ^! T' Y( V7 h
planar pick-up coils for signal detection. The use of5 t0 f' W; }$ h) Q
electroplating leads to a low-cost fabrication process ( h5 L1 c' ^% R* a3 B% Eand the use of planar pick-up coils provides easy$ y2 e$ L$ k& u4 I- {
integration with CMOS processes. The fabricated 0 V5 {+ b2 h' l$ t4 S9 ksensor has an excitation independent linear range of ; \ ^8 B4 X: S% U& y7 b/ B: i±100 μT, a sensitivity of 280 μV/mT, and an average2 C4 e/ _) `5 X& @# ^
power dissipation of 0.8 mW for 30 mA-peak m/ [( b" Z6 k8 y. d
sinusoidal excitation current at 100 kHz frequency.8 V6 b6 U, {% P9 c
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