標題: An Orthogonal Fluxgate-Type Magnetic Microsensor[EPFL] [打印本頁] 作者: mt7344 時間: 2007-6-6 10:44 PM 標題: An Orthogonal Fluxgate-Type Magnetic Microsensor[EPFL] ABSTRACT & r/ O2 e8 Q' D* n$ @/ CIn this paper, we present a new microfabricated) R: Z7 c2 {) ]9 E' J" k" I
orthogonal fluxgate sensor structure. The sensor " B) I- L6 K, \- m2 v) J2 ^8 Bconsists of an electroplated copper excitation rod 8 G" W! X* I8 `! t, ^$ ysurrounded by an electroplated permalloy layer and has 4 o3 a/ N4 M* v! pplanar pick-up coils for signal detection. The use of 9 q& W) p& |8 R0 telectroplating leads to a low-cost fabrication process" ?3 c! X9 R0 U. N5 T7 S* C: \
and the use of planar pick-up coils provides easy ' U' _1 W0 M. Q- O; I- |9 B4 Z' j" tintegration with CMOS processes. The fabricated ' G' T# y3 {6 G$ x8 C9 msensor has an excitation independent linear range of' R) u( a4 }3 i
±100 μT, a sensitivity of 280 μV/mT, and an average& r. S6 r5 \9 w. W
power dissipation of 0.8 mW for 30 mA-peak . T+ i3 Z& U/ `sinusoidal excitation current at 100 kHz frequency. % J) d, z% w0 x+ R0 N6 j- k; j( f 5 }5 p0 o8 s1 o: ]* i * n0 k {+ i; [- r7 D, u5 o2 |+ l網路上抓的 paper, 希望對大家有幫助!!6 o7 R6 n: P2 Z% C8 [( x
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