標題: An integrated micro-Hall probe for scanning magnetic microscopy[EPFL] [打印本頁] 作者: mt7344 時間: 2007-6-6 10:41 PM 標題: An integrated micro-Hall probe for scanning magnetic microscopy[EPFL] Abstract ; D6 R2 b+ @, X8 X l5 rAnewmicrosystem with the ability to detect magnetic microstructures based on the non-invasive Hall principle is presented. The micro-Hall plate embedded in the microsystem and scaled down to the physical limits of the employedCMOStechnology has an active area of only 2.4m×2.4m. The microsystem exhibits an output sensitivity of 7.5 V/T in perpendicular direction to the chip surface and a magnetic field resolution of 300 nT/√Hz at 1 Hz. A two-dimensional magnetic scanner was developed to demonstrate the performances of the developed microsystem.) _8 W; Z1 M3 F0 ?+ h9 C2 K. y7 V) a
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