標題: An integrated micro-Hall probe for scanning magnetic microscopy[EPFL] [打印本頁] 作者: mt7344 時間: 2007-6-6 10:41 PM 標題: An integrated micro-Hall probe for scanning magnetic microscopy[EPFL] Abstract* u3 i k [9 w) Z$ C5 G/ P8 F/ z, Q* B
Anewmicrosystem with the ability to detect magnetic microstructures based on the non-invasive Hall principle is presented. The micro-Hall plate embedded in the microsystem and scaled down to the physical limits of the employedCMOStechnology has an active area of only 2.4m×2.4m. The microsystem exhibits an output sensitivity of 7.5 V/T in perpendicular direction to the chip surface and a magnetic field resolution of 300 nT/√Hz at 1 Hz. A two-dimensional magnetic scanner was developed to demonstrate the performances of the developed microsystem. 4 c; X( W( v' R 0 @9 @: y2 Q F, T$ @1 p " I `" Y2 T t I1 o2 d8 _8 e網路上抓的 paper, 希望對大家有幫助!!; o- F0 a9 W0 H# I+ Q2 ?) i. S
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