Fluxgate-type magnetic microsensors for wide linear measuring range[EPFL] - Chip123 科技應用創新平台

ABSTRACT
& K7 Q2 z/ n- e# r% z8 a, j4 UIn this paper, we present a microfabricated fluxgate sensor for wide linear measuring range applications. The sensor consists of an electroplated copper excitation rod surrounded by an electroplated Permalloy core layer, and has planar pick-up coils for signal detection. Fabricated sensors are tested in orthogonal and parallel operation modes. The effects of operation modes and excitation conditions are compared. A linear operating range of ±900 μT is proved in the orthogonal mode, whereas the same sensor has much lower linear range in the parallel mode. The use of the sensor in a contactless current measurement application is also presented.
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